Aaryan Oberoi

Doc. AO—2026
Rev. 3.5 · MMXXVI

Device engineering on advanced Silicon.

Front-end of line /
advanced CMOS nodes.
Intel · Hillsboro, OR.

Aaryan Oberoi
Discipline
Device Engineering
+ Data Scientist
Focus
FEOL · MOL ·
Backside Power
Presently
Intel
since 2024

About

I work on the device physics of advanced Silicon CMOS. At Intel that spans front-end-of-line transistor development, middle-of-line, and backside power delivery for advanced CMOS nodes — with earlier work on 18A scribe-line Etest infrastructure and 1T1C embedded DRAM on FinFET. My PhD at Penn State, including a research stint at TSMC, covered 2D and 1D channel materials: the same set of problems from the other direction.

Specifications

Specialization
FEOL transistor development · middle-of-line · Backside Power Delivery
Channel materials
Si CMOS (FinFET, GAA) · WSe₂ / MoS₂ · 1D CNT
Doctorate
Penn State, 2024 · Engineering Science & Mechanics
Published work
~1,500 citations · 2× IEDM · Nature Electronics · 2× Nature Communications · Nature Nanotechnology · ACS Nano
Based
Hillsboro, OR

Education

Selected projects

01

Front-end of line, advanced CMOS node

2026 — present · Intel

Device representative for the front-end of line on an advanced CMOS node, driving process and integration decisions across the transistor module. Also responsible for the test-structure layouts that feed Silicon decisions.

Scope
Process integration, transistor module
Role
Device representative · FEOL
Output
Process calls · test-structure layouts
Gate-all-around transistor, channel direction S G D gate-all-around
02

Backside Power Delivery, advanced CMOS node

2025 — present · Intel
Backside power delivery network

Device performance lead for backside power delivery on an advanced CMOS node — moving power off the frontside entirely and routing it through the wafer backside instead, which lowers IR drop and frees up frontside tracks for signal-only routing.

Role
Device performance lead
Focus
Wafer Backside Power network
Benefit
Lower IR drop, freed frontside routing

On Intel's PowerVia backside power ↗

03

1T1C embedded DRAM on FinFET

2024 — 2025 · Intel
1T1C DRAM cell circuit schematic WL BL Cs 1T1C DRAM cell

Device work on a 1T1C embedded DRAM cell built on FinFET access-transistor technology — a denser, lower-leakage alternative to standalone DRAM for on-die memory at advanced nodes.

Access device
FinFET
Cell
One transistor, one capacitor
Use case
Embedded DRAM (eDRAM)
04

18A / 18A-P scribe-line Etest infrastructure

2024 — 2025 · Intel

Built the Etest data infrastructure and layout automation for target generation across Intel's 18A and 18A-P technologies. Served as the device-side interface to the Product Engineering team — defining what gets measured by the process control monitor (PCM) structures in the scribe line and how that data flows back to Silicon decisions.

Technologies
Intel 18A · 18A-P
Output
Etest infrastructure · layout automation
Test
Process control monitor (PCM) in scribe line
Wafer scribe-line Etest structures scribe line wafer · die grid Etest PCM in scribe line
05

Defect density and Capacitance of single CNT (TSMC Corporate Research)

Feb — Aug 2023 · TSMC CR

Six-month research internship in TSMC's Corporate Research Exploratory Devices and Materials group, advised by Dr. Iuliana Radu and Dr. Matthias Passlack. Worked with random networks of carbon nanotubes, using ultra-low-impedance measurements to extract single-nanotube capacitance and mobility and to drive down interface-trap and defect density — work that fed into IEDM submissions, plus internal tooling: an automated GDS generator and LCR-meter analysis software.

Group
TSMC Corporate Research, CREDM
Network
Random-network 1D CNTs
Output
IEDM 2023 & 2024 · automation tooling
Band diagram: CNT channel through IL and high-k to gate Conduction and valence band edges stepping up and down across the CNT channel, a thin interfacial layer, the high-k gate dielectric, and the gate metal, with interface trap states marked and reduced at the CNT–IL boundary. EC EV CNT IL high-k gate
06

p-type WSe₂ FETs via Pd–Se alloy contacts

2020 — 2024 · Penn State
WSe₂ FET channel and Pd–Se alloy contact interface WSe₂ channel Pd–Se alloy Al₂O₃ · back gate

Engineered a selenium interlayer that alloys with palladium during deposition, reducing contact resistance in bilayer WSe₂ FETs and decoupling RC from channel-length scaling. Result was a 3× reduction in contact resistance down to 16 kΩ·µm — foundational outcome of the thesis, published in ACS Nano.

Channel
Bilayer WSe₂ (MOCVD)
RC
49 kΩ·µm → 16 kΩ·µm
Yield
49% → 65%
07

Biomimetic collision detection in MoS₂

2019 — 2020 · Penn State

Built an in-memory MoS₂ photodetector that mimics the looming-response neurons in the locust visual system — the device output grows exponentially as a virtual object approaches and spikes at impact. Nature Electronics cover paper, ~300+ citations.

Device
Monolayer MoS₂ memtransistor
Function
In-memory looming response
Venue
Nature Electronics 3, 646 (2020)
Looming response: device current vs time-to-collision spike t I_DS collision no impact looming
More research ↗

Skills matrix

Process & fab
EBL · ALD · CVD · PEALD · RTA · RIE · thin-film transfer · UV-O₃
Materials char.
AFM · SEM · XPS · TEM · EDS · SAED · profilometry
Electrical test
Keysight B1500A · Keithley 4200SCS · LCR E4980 · Lakeshore cryo probe · MPI prober
Simulation
TCAD Sentaurus · Virtual Source · Landauer · MATLAB · JMP
Layout / design
Cadence Virtuoso · Raith GDSII · kLayout · MicroWind · LTspice
Programming
Python · MATLAB · VBA · LLM workflow automation

Selected publications

~1,500 total citations across publications in Nature Electronics, Nature Nanotechnology, Nature Communications, ACS Nano, and IEEE IEDM. Coverage in Nature Electronics cover (Vol. 7, Oct 2024), Phys.org, Physicsworld, TechXplore, Daily Mail. Full list on Google Scholar.

Reviewing & service

Journal review
27 reviews · Adv. Funct. Mater. · ACS Nano Letters · npj 2D Materials · ACS Applied Electronic Materials · IEEE EDL · Scientific Reports · MDPI
Conference review
IEEE IEDM (9 reviews) · Intel review committee under Dr. Chung-hsun Lin (2024 — )
Recognition
ACS Outstanding Reviewer, 2024
Mentorship
Training new device engineers and technicians at Intel
Leadership
President, Engineering Graduate Student Council, Penn State (2020 — 2021)
Entrepreneurship
Founder & CEO, SculpIt (2016 — 2017) · Entrepreneurial Lead, NSF I-Corps program (2023)

Get in touch

Scholar
Google Scholar
Résumé
aaryan-oberoi-2026.pdf
PhD Thesis
Penn State ETDA

Open to conversations on Silicon device physics at the leading edge, advanced memory architectures, and the device-level problems each new node surfaces.

The device, in cross-section